Measurement Technology for Micro-Nanometer Devices
W
Wendong Zhang X
Xiujian Chou T
Tielin Shi Z
Zongmin Ma H
Haifei Bao J
Jingdong Chen L
Liguo Chen D
Dachao Li C
Chenyang XueA fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Publication
2016
Pages
352
Format
Publisher
Wiley
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